Reactive lon Etching / Polymerisation
The RIE family consists of single or twin chamber systems.
Features
- Turbomolecular pumping system for corrosive    gases
- Chemical rotary vane pump, fomblin oil or dry    compressing pump
- 13,56 MHz power supply with automatic matching    network
- Process gas box with MFC
- Software control preprogrammed recipes. Service    operation. Remote service control parameter
- Low maintenance costs. Low service costs. Easy    upgrade
Accessories
- Roots pumping system
- Ion milling source (RIBE)
- Electrostatic chuck up to Ø 200 mm
- Gas helium substrates cooling
- Laser and point detection
Applications
- Semiconductor
- Microelectronic
- Electron-optics

Plasma Machines for Deposition, Etching
- Deposition of silicon oxide
- Deposition of silicon nitride
- Deposition of silicon oxy-nitride
- Deposition of amorphous silicon

Vacuum Evaporation Units
VICO vacuum coating unit offers the individual customer a superior equipment required to satisfy his particular requirments. The unit can he made useful for wide variety of applications including demostration of coating techniques. Vertical Chamber vacuum coaters presently are being offered in two models :
- High Vacuum Coater (VC-12)
- High Vacuum Coater (VC-15)
Vacuum Coating Units with sophisticated instrumentation up to the size 610 mm are available for laboratory and batch production. Above the base plate, accessories include :
- D.C. and R.F. Sputtering.
 - Multifillament Turret.
- Specimen Preparation Accessories for TEM & SEM.
- Flash Evaporation facility.
- Bent Beam Electron Gun (180°).